Line Card

3DIC TSV and BWS TTV矽片表麵形貌測量
Film Stress薄膜應力量測儀
FEOL Electrical Characterization 電學特性
Thin wafer metrology 晶圓測量學
Film Adhesion漆膜附著力測試Global Film Stress Adhesion
Local and Lattice Stress
Thickness, Topography & Geometry
Contact and Non-Contact Sheet Resistance

Metrology Tools forSemiconductor, LED, Solar, FPD, MEMS, Data Storage